The SC600T is a high-vacuum, fully automated coating system integrating DC magnetron sputtering and pulsed carbon fiber evaporation in a single platform. Designed for the most demanding FE-SEM and TEM applications, it delivers ultra-thin, fine-grained conductive films with exceptional reproducibility. With one-touch recipe-driven operation, a turbomolecular-pumped high vacuum environment (≤5E-3 Pa), and a motorized multi-functional stage, the SC600T provides the speed, purity, and flexibility required by high-throughput multi-user electron microscopy laboratories.

Key Features

• Dual-Function: Sputtering & Carbon Evaporation 

One-touch switching between metal sputtering and carbon fiber evaporation covers all routine SEM/TEM conductive coating needs.

• True One-Touch Coating 

Press the "One-Touch Coating" button to automatically evacuate, introduce gas, pre-condition, rotate stage, coat, and vent to atmosphere — no operator intervention needed.

• High-Performance Vacuum System 

Integrated turbomolecular pump (90 L/s) plus rotary vane backing pump achieves ultimate vacuum ≤5×10⁻³ Pa, ensuring clean deposition conditions for fine-grained films. Oil-free dry pump optional.

• Flexible Carbon Evaporation Modes 

Flash mode for rapid, thicker carbon films; Pulse mode for precise, sub-nanometer thickness control with minimal sample heating. Accommodates up to 4 carbon ropes with automatic status detection and real-time display.

• Built-in Contamination Prevention Dedicated anti-contamination shields for both sputtering and carbon modules open/close automatically, preserving film purity and extending component life.

• Motorized Multi-Functional Sample Stage Ø110 mm stage holds up to 14 SEM pin stubs. Motorized rotation and height adjustment optimize film uniformity. Optional tilt function available.

• On-the-Fly Parameter Adjustment 

Sputtering current (1–200 mA), time (1 s–10 h), working pressure, and carbon evaporation parameters are all adjustable in real time during the cycle.